ARIUS

지정상품

• 공업용 로봇(industrial robots)
• 반도체 제조기계 및 장치(반도체웨이퍼 수용용 진공챔버 및 진공챔버 외부로의 반도체웨이퍼 취급/이전을 위한 구조부품/기계 및 그 구조부품 및 부속품으로 구성된 것임)(semiconductor manufacturing machines and systems composed of a vacuum chamber for accommodating semiconductor wafers and structural parts and machines for handling and transferring semiconductor wafers into and out of vacuum chamber, and structural parts and fittings therefor)
• 반도체 제조용 기계 및 그 구조 구조부품/부속품(machines for manufacturing semiconductors, and structural parts and fittings therefor)
• 반도체 제조용 기계(semiconductor manufacturing machines)
• 반도체웨이퍼 가공처리용 리액터 즉 반도체웨이퍼 열처리용 화학반응기 및 화학기상증착 반응기(reactors for processing semiconductor wafers, namely, chemical reactors for the thermal treatment of semiconductor wafers and reactors for chemical vapor deposition)
• 반도체웨이퍼 가공처리용 전기식 리액터(electrical reactors for processing semiconductor wafers)
• 반도체웨이퍼 처리기계 즉 반도체웨이퍼 가공장비 및 그 구조부품/부속품(machines for the treatment of semiconductor wafers, namely, semi-conductor wafer processing equipment, and structural parts and fittings therefor)
• 산업용 화학공정용 반응기(industrial reaction vessels for chemical processing)
• 전자칩 조립 및 포장용 기계(machines for the assembly and packaging of electronic chips)

• 기계용 전자제어시스템(electronic control systems for machines)
• 반도체 부품(semiconductor component)
• 반도체 산업용 전자 제어기(electronic controllers for the semiconductor industry)
• 실험실용 화학 반응기(laboratory chemical reactors)
• 전자제어장치인 로봇 즉 실험실용 로봇(robots being electronic control devices, namely, laboratory robots)